• Equipment Front End Module EFEM220-D13
• Equipment Front End Module EFEM320-D01
• Equipment Front End Module EFEM320-D02
• Equipment Front End Module EFEM320-D03
• Equipment Front End Module EFEM320-D06
• Equipment Front End Module EFEM340-D08

Feature description

Equipment Front End Module (EFEM) is a complete automation system. Through vertical integration, with the self-developed control system, HIWIN provides customer-customized services for different process applications. HIWIN EFEM offers flexible options for Wafer ID reading, cassette RFID sensing, wafer protrusion sensing, wafer contour detection, FOUP presence detection, etc. EFEM working with wafer robots, together, make the equipment and process are more efficient and competitive.