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EFEM220-D13 Equipment Front End Module

  • EFEM220-D13 Equipment Front End Module
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    • 6", 8" Open Cassette standard model
    • Modular rack, configuration can be adjusted according to customer needs
    • Comply with international semiconductor equipment SEMI S2 safety specifications
    • Materials comply with RoHS specifications, and the cleanliness can reach ISO Class 1
    • A variety of sensors detect various components and monitor equipment status in real time
    • GUI interface software can remotely operate commands, integrate various device subsystems, and provide a single command format window

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