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EFEM320-D01 Equipment Front End Module

  • EFEM320-D01 Equipment Front End Module
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  • Information

    • 8" SMIF standard model
    • External electric control box design maximizes the internal space of the rack
    • Passed international semiconductor equipment SEMI S2 safety certification
    • Materials comply with RoHS specifications, and the cleanliness can reach ISO Class 1
    • A variety of sensors detect various components and monitor equipment status in real time
    • Barcode, label and character recognition to completely track the production process

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