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EFEM320-D03 Equipment Front End Module

  • EFEM320-D03 Equipment Front End Module
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  • Information

    • 8", 12" standard model
    • Hidden electric control box and edge finder design maximize the connection window
    • Passed international semiconductor equipment SEMI S2 safety certification
    • Materials comply with RoHS specifications, and the cleanliness can reach ISO Class 1
    • A variety of sensors detect various components and monitor equipment status in real time
    • Provide customized wafer or other machine board handling needs
    • The automatic pressure control system adjusts the fan speed to maintain the set value through changes in environmental pressure.

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