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EFEM320-D06 Equipment Front End Module

  • EFEM320-D06 Equipment Front End Module
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  • Information

    • 12"Wafer, 12" Metal Carrier standard model
    • Upper panel electric control box design, the best choice for one-to-two
    • Passed international semiconductor equipment SEMI S2 safety certification
    • Materials comply with RoHS specifications, and the cleanliness can reach ISO Class 1
    • A variety of sensors detect various components and monitor equipment status in real time
    • Real-time image monitoring, barcode and label character recognition, complete tracking of the production process
    • Provide customized wafer or other machine board handling needs

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