Feature

• Applicable for Various Specifications

Load Port HLP series can be used for loading and unloading 8-inch and 12-inch multiple substrates and capable of docking with FOUP/FOSB. Also offers optional adaptors for 8-inch open cassette and 12-inch metal carrier.

• Self-made Key Component

Load Port HLP series is equipped with self-made key components including Ballscrew, Linear Guideway, and Single Axis Robot. The EFEM also integrates with self-develop software. This makes able to provide vertical integration and flexible solution to customers.

APPLICATION

• Applied to various semiconductor process equipment, such as photolithography, etching, CVD, PVD, cleaning and inspection, etc.